Device and use of the device for measuring the density and/or the electron temperature and/or the collision frequency of a plasma

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United States of America Patent

PATENT NO 9113543
APP PUB NO 20130160523A1





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The invention relates to a device and method for measuring the density of a plasma by determining an impulse response to a high-frequency signal coupled into a plasma. The density, electron temperature and/or collision frequency as a function of the impulse response can be determined. A probe having a probe head and a probe shaft can be introduced into the plasma, wherein the probe shaft is connected to a signal generator for electrically coupling a high-frequency signal into the probe head. The probe core is enclosed by the jacket and has at its surface mutually insulated electrode areas of opposite polarity. A balun is arranged at the transition between the probe head and an electrically unbalanced high-frequency signal feed to convert electrically unbalanced signals into balanced signals.

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Patent Owner(s)

Patent OwnerAddress

International Classification(s)


Inventor Name Address # of filed Patents Total Citations
Awakowicz, Peter Bochum, DE 13 52
Brinkmann, Ralf Peter Erkrath, DE 4 27
Lapke, Martin Hamburg, DE 9 19
Musch, Thomas Bochum, DE 29 280
Mussenbrock, Thomas Wuppertal, DE 3 26
Oberrath, Jens Bochum, DE 1 0
Rolfes, Ilona Bochum, DE 3 17
Schulz, Christian Bochum, DE 42 1664
Storch, Robert Bochum, DE 5 0
Styrnoll, Tim Bochum, DE 1 0
Zietz, Christian Hannover, DE 5 262

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