SOI STRUCTURES WITH REDUCED METAL CONTENT
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United States of America Patent
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Issued Date -
Jul 4, 2013
app pub date -
Feb 8, 2013
filing date -
Jan 31, 2011
priority date (Note) -
Abandoned
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Abstract
Methods for producing silicon on insulator structures with a reduced metal content in the device layer thereof are disclosed. Silicon on insulator structures with a reduced metal content are also disclosed.
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