ILLUMINATION SYSTEM, ILLUMINATION METHOD, AND INSPECTION SYSTEM
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United States of America Patent
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Issued Date -
Jul 4, 2013
app pub date -
Dec 28, 2012
filing date -
Dec 31, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An illumination system includes a first illumination unit which uses an amount of illumination light in accordance with a set amount of light to illuminate an illuminated object, a second illumination unit which has a response to switching of the set amount of light better than said first illumination unit and which uses illumination light which is superposed on the illumination light from said first illumination unit to illuminate said illuminated object, and an illumination controller which controls the amount of illumination light of said second illumination unit by switching the set amount of light in accordance with the control information while maintaining the amount of illumination light of said first illumination unit at a predetermined amount.
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