HYBRID BULK ACOUSTIC WAVE RESONATOR

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United States of America Patent

SERIAL NO

13785104

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Abstract

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A hybrid bulk acoustic wave (BAW) resonator comprises a first electrode, a second. electrode, a piezoelectric layer disposed between the first and second electrodes, and a single mirror pair disposed adjacent the second electrode. In one example, the hybrid bulk acoustic wave resonator further comprises a substrate, and the first electrode is disposed adjacent the substrate. A method of fabricating a hybrid BAW resonator is also disclosed.

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Patent Owner(s)

Patent OwnerAddress
AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE LTD1 YISHUN AVENUE 7 768923

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
BARBER, Bradley Acton, US 9 104
BI, Zhiqiang Shrewsbury, US 16 145

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