METHOD OF SELF-ALIGNED FULLY INTEGRATED STCK FABRICATION
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United States of America Patent
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Issued Date -
Aug 1, 2013
app pub date -
Jan 31, 2012
filing date -
Jan 31, 2012
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Abstract
The embodiments disclose a method of self-aligned fully integrated stack fabrication that includes writing fully integrated self-aligned data and servo two dimensional low-frequency guiding patterns that include encoded servo-information to create various types of self-assembly low-frequency guiding structures, guiding high density self-assembly processes using the low-frequency guiding structures to create high density data and servo fields and etching the high density data and servo fields and low-frequency encoded servo-information into a template substrate to create fully integrated stack master templates to use in the fabrication of stacks such as bit patterned media.
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