Importance

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Abstract

A non-metallic material is separated using a single laser beam that is converted into a scribe beam and a break beam. A system includes a single laser source for generating a laser beam and a beam separator for converting the laser beam into a scribe beam having a first average power and a break beam having second average power. The beam separator directs the scribe beam to a scribe line on a substrate and the break beam to the substrate at a location that is spaced apart from the scribe beam. The scribe beam rapidly heats the substrate along the scribe line. A quenching subsystem applies a stream of cooling fluid to the substrate to propagate a microcrack along the scribe line. The break beam rapidly reheats the substrate quenched by the stream of cooling fluid to separate the substrate along the microcrack.

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First Claim