LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION
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United States of America Patent
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app pub date -
Sep 10, 2012
filing date -
Sep 19, 2007
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Abandoned
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Abstract
The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
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