METHOD OF PREPARING SAMPLE FOR TEM OBSERVATION
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United States of America Patent
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Issued Date -
Aug 15, 2013
app pub date -
Feb 7, 2013
filing date -
Feb 10, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Provided is a method of preparing a sample for TEM observation, including: supplying deposition gas to a cross-section of a lamellar portion having exposed recesses and irradiating a deposition film forming region of the cross-section including the recesses with an electron beam, thereby forming a deposition film; irradiating the deposition film with an ion beam, thereby removing a deposition film formed on the cross-section; and irradiating the lamellar portion with the ion beam, thereby thinning the lamellar portion.
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