APPARATUS AND METHOD FOR COATING SUBSTRATES USING THE EB/PVD PROCESS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20130209706A1
SERIAL NO

13642088

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus for coating substrates with a coating material is disclosed. The apparatus includes a frame and a crucible arrangement including a first crucible and a second crucible disposed on the frame. Only one first shaft is associated with the first crucible and only one second shaft is associated with the second crucible, where the only one first and second shafts are disposed in the frame beneath the first and second crucibles, respectively. Only one first lifting device is associated with the only one first shaft and only one second lifting device is associated with the only one second shaft, where the only one first and second lifting devices are disposed in the frame. The only one first and second shafts and the only one first and second lifting devices are laterally displaceable with the frame.

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Patent Owner(s)

Patent OwnerAddress
ALD VACUUM TECHNOLOGIES GMBHOTTO-VON-GUERICKE-PLATZ 1 HANAU 63457

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hotz, Juergen Muenster, DE 5 63
Lemke, Juergen Weinheim, DE 2 7
Schuhmann, Gerhard Krombach, DE 1 4
Schwagmann, Johannes Waechtersbach, DE 1 4
Seserko, Pavel Karlstein, DE 4 23
Wittich, Joerg Otzberg, DE 2 11

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