Apparatus for treating and/or coating the surface of a substrate component
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United States of America Patent
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Jul 14, 2020
Grant Date -
Aug 22, 2013
app pub date -
Apr 1, 2013
filing date -
Dec 15, 2008
priority date (Note) -
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status (Latency Note)
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Abstract
Apparatus for treating and/or coating the surface of substrate components by deposition from the gas phase. A plurality of substrate carriers and a plurality of coating and/or treating units are arranged in a deposition or treatment chamber which can be evacuated. The system can be equipped in a modular fashion such that the substrate components introduced into the system in a batch can be subjected to different treatments. Method for treating and/or coating the surface of substrate components. The procedure comprises: a) compiling coating and/or treating units and shielding elements from modules in the deposition or treatment chamber; b) equipping the substrate carriers with those substrate components that are to be subjected to the same treatment; c) closing the deposition or treatment chamber; and d) carrying out the individual treatment or coating programs for the substrate components combined in groups on the substrate carriers in one batch.
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