Cleanspace Fabricators for High Technology Manufacturing and Assembly Processing
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United States of America Patent
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Issued Date -
Aug 29, 2013
app pub date -
Jan 5, 2013
filing date -
Aug 12, 2006
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Abstract
The present invention provides various aspects for processing multiple types of substrates within cleanspace fabricators or for processing multiple or single types of substrates in multiple types of cleanspace environments. In some embodiments, a collocated composite cleanspace fabricator may be capable of processing semiconductor devices into integrated circuits and then performing assembly operations to result in product in packaged form.
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