Apparatus and Method for Inspecting Chip Defects
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United States of America Patent
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Issued Date -
Sep 12, 2013
app pub date -
Mar 9, 2012
filing date -
Mar 9, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Disclosed is a chip defect inspection apparatus including a linear array image acquisition module, an illumination control module, a chip defect detection module connected to the LIA module, and an operations and management module connected to the LIA module, the illumination control module and the chip defect detection module.
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