APPARATUS AND SYSTEM FOR CONTROLLING THE TEMPERATURE OF OBJECTS
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United States of America Patent
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May 6, 2013
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Nov 5, 2010
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Abstract
An apparatus controls the temperature of objects such as workpieces after a cleaning operation. The apparatus has a controlled temperature zone (14), which is formed as a cooling and/or heating zone and in which the objects can be subjected to an incident flow of gaseous fluid. The controlled temperature zone (14) is formed in a chamber (12) which can be subjected to a fluid flow (58) which flows into the chamber (12).
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