ISOLATION BETWEEN A BAFFLE PLATE AND A FOCUS ADAPTER
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United States of America Patent
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Issued Date -
Sep 19, 2013
app pub date -
Mar 15, 2012
filing date -
Mar 15, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A device is provided for preventing contact between a baffle plate and a focus adapter in the upper chamber of an ashing system. The device includes a housing, a baffle plate including a plurality of holes, a focus adapter between the housing and the baffle plate, a plurality of spacers aligned with the holes, and a plurality of fasteners securing the spacers between the baffle plate and the housing, wherein the spacers isolate the focus adapter from contacting the baffle plate.
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