Kelvin Sense Probe Calibration

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United States of America Patent

APP PUB NO 20130249566A1
SERIAL NO

13428959

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Calibrating automatic test systems for testing electronic components using Kelvin probes is taught. A nominal contact resistance of a Kelvin probe is measured using a test slug to replace an electronic component to be measured on the test system. The measured resistance is stored by the test system and can be used to compensate for a measured value for an electronic component. A test slug can be periodically inserted into the test system to update the contact resistance measure and/or track the contact resistance to measure Kelvin probe wear and/or contamination.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC13900 NW SCIENCE PARK DRIVE PORLTLAND OR 97229

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huntington, James Beaverton, US 1 1

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