SYSTEM AND METHOD FOR GENERATING CARE AREAS FOR DEFECT INSPECTION
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United States of America Patent
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Issued Date -
Sep 26, 2013
app pub date -
Mar 26, 2012
filing date -
Mar 26, 2012
priority date (Note) -
Abandoned
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Abstract
A method of generating care areas is disclosed. An artwork file of a layout of a product is provided and a cell tree of the layout is formed. The cell tree includes a plurality of cells of the layout arranged in a hierarchical order. The method also includes defining care areas in the artwork file of the layout.
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