Probe Card And Manufacturing Method Therefor
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United States of America Patent
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Issued Date -
Oct 10, 2013
app pub date -
Jan 16, 2011
filing date -
Jan 16, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a ST board 2 that is formed with an lower surface electrode 22; a unit attachment plate 3 that is fastened on the ST board 2 and formed with an opening part 31 exposing the lower surface electrode 22; a probe unit 5 that includes a probe substrate 50 formed with a contact probe 51 and a probe electrode 52 and is fastened on the unit attachment plate 3; and an electrically conductive wire 54 that connects the lower surface electrode 22 and the probe electrode 52 to each other through the opening part 31. The probe unit 5 can be fastened on the ST board 2 with the unit attachment plate 3 intervening, and through the opening part 31 of the unit attachment plate 3, the probe electrode 51 and the lower surface electrode 22 can be electrically connected to each other.
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