Bisamineazaallylic ligands and their use in atomic layer deposition methods

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United States of America Patent

PATENT NO 9127031
APP PUB NO 20130267709A1
SERIAL NO

13908359

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Abstract

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Methods for deposition of elemental metal films on surfaces using metal coordination complexes comprising bisamineazaallylic ligands are provided. Also provided are bisamineazaallylic ligands useful in the methods of the invention and metal coordination complexes comprising these ligands.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INCSANTA CLARA CA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anthis, Jeffrey W San Jose, US 89 4744
Thompson, David San Jose, US 345 15589

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