Method for self-monitoring a ceramic pressure measuring cell of a capacitive pressure sensor and evaluation circuit for carrying out said method

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United States of America Patent

PATENT NO 9316557
APP PUB NO 20130269412A1
SERIAL NO

13883851

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Abstract

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A method for monitoring the operation of a pressure measuring cell (10) of a capacitive pressure sensor (1), wherein the pressure measuring cell (10) has a measuring capacitor (CM) and a reference capacitor (CR) and the pressure measuring value (p) is obtained from the capacity values of the measuring capacitor (CM) and the reference capacitor (CR), characterized in that a control pressure measuring value (p′) is obtained with an auxiliary capacitor (CZ) arranged outside the pressure measuring cell (10) and the operability of the pressure measuring cell (10) is inferred by comparing the pressure measuring value (p) to the control pressure measuring value (p′) is provided.

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Patent Owner(s)

  • I F M ELECTRONIC GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Walter, Heinz Hergatz, DE 15 91

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