Method for Producing Silicon Chloride from Silicon Sludge
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United States of America Patent
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Issued Date -
Oct 17, 2013
app pub date -
Apr 11, 2013
filing date -
Apr 12, 2012
priority date (Note) -
Abandoned
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Abstract
Provided is a method for producing silicon chloride from silicon sludge by separating and recovering silicon carbide from waste silicon sludge generated during a semiconductor manufacturing process. With the method for producing silicon chloride from silicon sludge according to the present invention, oil components, iron, silicon that are contained in the silicon sludge may be removed, and silicon carbide may be selectively separated, thereby making it possible to produce high purity silicon chloride that may be used as a raw material for producing silica, silicon, or the like.
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