METHOD AND APPARATUS FOR SCRIBING SILICON CARBIDE PLATE
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United States of America Patent
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Issued Date -
Oct 24, 2013
app pub date -
Jan 7, 2011
filing date -
Jan 7, 2011
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Abstract
A scribing apparatus 1 includes a horizontal table 3 on which a silicon carbide plate 2 is fixed under vacuum suction; a feed screw 5 and a Y-axis control motor 6 for moving the table 3 along a pair of guide rails 4 under scribe numerical control; a guide rail device body 7 installed above the table 3 along an X-axis direction; a carriage 8 mounted on the guide rail device body 7 so as to move in the X-axis direction while being guided; a feed screw and an X-axis control motor 9 for moving the carriage 8 in the X-axis direction under numerical control; and a scribe head 10 installed on the carriage 8.
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