APPARATUS AND METHOD FOR TREATING PERFLUORO-COMPOUND
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United States of America Patent
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Issued Date -
Oct 24, 2013
app pub date -
Dec 24, 2012
filing date -
Apr 23, 2012
priority date (Note) -
Abandoned
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Abstract
The present invention discloses an apparatus and method for treating perfluoro-compounds (PFCs). The method for treating PFCs includes: (a) decomposing PFCs and eliminating a first acid gas generated by the decomposition through a pre-cleaner; (b) filtering out dust particles from the exhaust gas through a filter; (c) electrifying the dust particles in the exhaust gas by electrical discharge and collecting dusts through a dust collector; (d) decomposing PFCs using a regenerative/catalytic reaction through a catalytic reactor; (e) eliminating a second acid gas generated by the regenerative/catalytic reaction through a post-cleaner; and (f) letting the purified exhaust gas out through a fan.
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