Plasma resistant ceramic coated conductive article

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United States of America Patent

PATENT NO 9394615
APP PUB NO 20130284373A1
SERIAL NO

13687512

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Abstract

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To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 μin. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Duan, Ren-Guan Fremont, US 70 5650
Kanungo, Biraja P San Jose, US 52 1990
Lubomirsky, Dmitry Cupertino, US 294 27159
Noorbakhsh, Hamid Fremont, US 69 2004
Sun, Jennifer Y Mountain View, US 254 11326
Yuh, Junhan Palo Alto, US 1 234

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