THIN FILM FORMING DEVICE FOR SOLAR CELL AND THIN FILM FORMING METHOD

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United States of America Patent

APP PUB NO 20130295751A1
SERIAL NO

13978942

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Abstract

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This thin film forming method for a solar cell forms a thin film that contains a plurality of elements on the surface of an object to be processed. A raw material solution that contains the elements is dispersed in a processing space and microparticles by an electric field, and the microparticles that are dispersed form a thin film that adheres to the surface of the object to be processed. Thus, a thin film for a solar cell element with preferable crystallinity can be formed even in an atmosphere at atmospheric pressure.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO 107-6325
UNIVERSITY OF YAMANASHIKOFU-SHI YAMANASHI 400-8510

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hara, Kenichi Yamanashi, JP 34 233
Kato, Takamasa Yamanashi, JP 19 67
Narushima, Masaki Yamanashi, JP 28 1237

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