Method for vapor condensation and recovery
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United States of America Patent
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Issued Date -
Nov 7, 2013
app pub date -
May 2, 2013
filing date -
May 2, 2012
priority date (Note) -
Abandoned
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Abstract
Methods for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation.
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