APPARATUS AND METHOD FOR TRANSPORTING WAFER-SHAPED ARTICLES

United States of America Patent

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Issued Date
Nov 21, 2013
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May 16, 2012
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May 16, 2012

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Abstract

An apparatus for transporting a wafer-shaped article, comprises a holder configured to hold a wafer-shaped article of a predetermined diameter, attached to a robot arm that is horizontally movable, via a linkage. The holder is vertically movable relative to the distal end of the robot arm via the linkage from a retracted position to an extended position.

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Patent Owner	Address
LAM RESEARCH AG	9500 VILLACH

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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Inventor Name	Address	# of filed Patents	Total Citations
GLEISSNER, Andreas	RADENTHEIN, AT	44	390

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APPARATUS AND METHOD FOR TRANSPORTING WAFER-SHAPED ARTICLES

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13472860

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13472860

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