Polishing composition

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United States of America Patent

PATENT NO 9662763
APP PUB NO 20130324015A1
SERIAL NO

14000319

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Abstract

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Provided is a polishing composition containing at least aluminum oxide abrasive grains and water, and having a pH of 8.5 or higher. The aluminum oxide abrasive grains have a specific surface area of 20 m2/g or less. It is preferable for the aluminum oxide abrasive grains to have an average secondary particle size of 0.1 μm or more and 20 μm or less. The polishing composition is used for polishing hard and brittle materials having a Vickers hardness of 1,500 Hv or higher, such as sapphire, silicon carbide, and gallium nitride.

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Patent Owner(s)

  • FUJIMI INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asano, Hiroshi Kiyosu, JP 128 946
Okada, Yasunori Kiyosu, JP 22 245
Tamai, Kazusei Kiyosu, JP 42 292

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