NORMALLY-OFF GALLIUM NITRIDE TRANSISTOR WITH INSULATING GATE AND METHOD OF MAKING THE SAME

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United States of America Patent

APP PUB NO 20130328061A1
SERIAL NO

13604983

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A normally-off transistor includes a channel layer, an electron supply layer overlaying the channel layer, a source electrode and a drain electrode on the electron supply layer, an area in the electrode supply layer between the source electrode and the drain electrode treated with a fluoride based plasma followed by a chlorine based plasma treatment, a gate insulator overlaying the area, and a gate electrode overlaying the gate insulator.

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Patent Owner(s)

Patent OwnerAddress
HRL LABORATORIES LLC3011 MALIBU CANYON ROAD MALIBU CA 90265

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boutros, Karim S Moorpark, US 27 942
Burnham, Shawn D Oxnard, US 12 156
Chu, Rongming Newbury Park, US 54 1407
Corrion, Andrea Oak Park, US 26 182
Hughes, Brian Woodland Hills, US 23 170

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