PLANE HEATING FILM FOR INTEGRATED GAS SUPPLY SYSTEM, AND METHOD OF MANUFACTURING SAME
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United States of America Patent
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Issued Date -
Dec 19, 2013
app pub date -
Jun 13, 2013
filing date -
Jun 18, 2012
priority date (Note) -
Abandoned
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Abstract
A novel heat retainer/heat generator is provided using carbon nanotube (CNT) paper, particularly, a plane heating film suitable for use in an integrated gas supply system for supplying a special gas for semiconductor manufacturing. The plane heating film comprises a piece of electrically conductive paper created by mixing carbon nanotubes with pulp fiber, and processing the mixture into a sheet, electrodes disposed in an end area of the electrically conductive paper for supplying power to the electrically conductive film, and heat-resistive insulating films for laminating both sides of the electrically conductive paper. With the employment of carbon nanotubes, the plane heating film is improved in temperature characteristics, heat generating efficiency, and durability.
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