OPTICAL SENSORS DEVICES INCLUDING A HYBRID OF WAFER-LEVEL INORGANIC DIELECTRIC AND ORGANIC COLOR FILTERS

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United States of America Patent

APP PUB NO 20140001588A1
SERIAL NO

13535925

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Abstract

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Monolithic optical sensor devices, and methods for fabricating such devices, are described herein. In an embodiment, a semiconductor wafer substrate includes a plurality of photodetector (PD) regions. A wafer-level inorganic dielectric optical filter is deposited and thereby formed over at least a subset of the plurality of PD regions. One or more wafer-level organic color filter(s) is/are deposited and thereby formed on one or more selected portion(s) of the wafer-level inorganic dielectric optical filter that is/are over selected ones of the PD regions. For example, an organic red filter, an organic green filter and an organic blue filter can be over, respectively, portions of the wafer-level inorganic dielectric optical filter that are over first, second and third PD regions.

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Patent Owner(s)

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INTERSIL AMERICAS LLC1001 MURPHY RANCH ROAD MILPITAS CA 95035

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dyer, Kenneth C Pleasanton, US 26 111
Hebert, Francois San Mateo, US 171 2632
Lee, Eric S San Francisco, US 14 23
Sun, Michael I-Shan San Jose, US 5 3

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