MEMS DEVICE ENCAPSULATION WITH CORNER OR EDGE SEALS
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United States of America Patent
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Issued Date -
Jan 2, 2014
app pub date -
Jun 28, 2012
filing date -
Jun 28, 2012
priority date (Note) -
Abandoned
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Abstract
This disclosure provides systems, methods and apparatus for packaging a device, for example an electromechanical systems (EMS) device, with a seal. In one aspect, the EMS device includes a primary seal positioned around a perimeter of the EMS device and in contact with a substrate and a cover plate, and a secondary seal positioned around portions of an outer periphery of the primary seal and in contact with the substrate and the cover plate. The primary seal can have low outgassing and low permeability of water vapor, and the secondary seal can have high mechanical strength that does not degrade when adhered to glass.
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