Processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9603231
APP PUB NO 20140014269A1
SERIAL NO

14030003

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Importance

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Abstract

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A processing apparatus includes a substrate supporting unit that supports a substrate in a processing space in which the substrate is processed, a first partitioning member that includes a ceiling portion having an opening and partitions the processing space from an outer space, and a second partitioning member that is attached to the first partitioning member so as to close the opening and partition the processing space from the outer space together with the first partitioning member. The second partitioning member is attached to the first partitioning member so that the second partitioning member is removable from the first partitioning member by moving the second partitioning member toward a space which a lower surface of the ceiling portion faces.

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Patent Owner(s)

Patent OwnerAddress
CANON ANELVA CORPORATION2-5-1 KURIGI ASAO-KU KAWASAKI-SHI KANAGAWA-KEN 215-8550

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hasegawa, Masami Kunitachi, JP 35 335
Osada, Tomoaki Fuchu, JP 32 402

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