Multiple zone heater

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9984866
SERIAL NO

13831670

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A multi-zone heater with a plurality of thermocouples such that different heater zones can be monitored for temperature independently. The independent thermocouples may have their leads routed out from the shaft of the heater in a channel that is closed with a joining process that results in hermetic seal adapted to withstand both the interior atmosphere of the shaft and the process chemicals in the process chamber. The thermocouple and its leads may be enclosed with a joining process in which a channel cover is brazed to the heater plate with aluminum.

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Patent Owner(s)

  • COMPONENT RE-ENGINEERING COMPANY, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balma, Frank Los Gatos, US 28 586
Elliot, Alfred Grant Palo Alto, US 24 467
Elliot, Brent Donald Alfred Cupertino, US 20 467
Rex, Dennis George Williams, US 24 504
Schuster, Richard Erich Milpitas, US 19 464
Veytser, Alexander Mountain View, US 27 627

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