Method For Hermetically Joining Ceramic Materials Using Brazing Of Pre-Metallized Regions
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United States of America Patent
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Issued Date -
Jan 16, 2014
app pub date -
Mar 14, 2013
filing date -
Jun 12, 2012
priority date (Note) -
Abandoned
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Abstract
A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The ceramic pieces may be pre-metallized using a thin film sputtering technique which deposits aluminum, or an aluminum alloy, onto the joint interface areas. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.
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