Cleaning liquid and anticorrosive agent comprising a mercapto compound and solvent

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United States of America Patent

PATENT NO 8802610
APP PUB NO 20140018281A1
SERIAL NO

14021505

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Abstract

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A method of cleaning a substrate having a metal layer including copper or a copper-containing alloy, the method including cleaning the substrate using a cleaning liquid that includes a mercapto compound represented by one or both of the following formulas (1) and (2), and a solvent containing water and a water-soluble organic solvent:

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Patent Owner(s)

Patent OwnerAddress
TOKYO OHKA KOGYO CO LTD150 NAKAMARUKO NAKAHARA-KU KAWASAKI-SHI KANAGAWA 211-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eto, Takahiro Kawasaki, JP 12 33
Haraguchi, Takayuki Kawasaki, JP 35 146
Kumagai, Tomoya Kawasaki, JP 38 214
Mori, Daijiro Kawasaki, JP 14 28
Ohhashi, Takuya Kawasaki, JP 11 27

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