APPARATUS FOR MANUFACTURING GRAPHENE FILM AND METHOD FOR MANUFACTURING GRAPHENE FILM
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United States of America Patent
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Issued Date -
Jan 23, 2014
app pub date -
Mar 14, 2012
filing date -
Mar 17, 2011
priority date (Note) -
Abandoned
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Abstract
Provided is a graphene film manufacturing apparatus including a source fluid supply unit for supplying a source fluid containing carbon; a gas discharge unit for receiving the source fluid from the source fluid supply unit, thermally decomposing the source fluid into a gas, and discharging the gas; a catalyst substrate disposed to contact the gas discharged from the gas discharge unit, and a heating device disposed to locally heat a region of the catalyst substrate that contacts the discharged gas.
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