Method for testing a test substrate under defined thermal conditions and thermally conditionable prober

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United States of America Patent

PATENT NO 9395411
SERIAL NO

13953545

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Abstract

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In a method and a device for testing a test substrate under defined thermal conditions, a substrate that is to be tested is held by a temperature-controllable chuck and is set to a defined temperature; the test substrate is positioned relative to test probes by at least one positioning device; and the test probes make contact with the test substrate for testing purposes. At least one component of the positioning device that is present in the vicinity of the temperature-controlled test substrate is set to a temperature that is independent of the temperature of the test substrate by a temperature-controlling device, and this temperature is held constant.

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Patent Owner(s)

  • CASCADE MICROTECH, INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kanev, Stojan Thiendorf OT Sacka, DE 44 174
Kiesewetter, Joerg Thiendorf OT Sacka, DE 9 38
Schmidt, Axel Thiendorf OT Stoelpchen, DE 71 618
Stoll, Karsten Sohland an der Spree, DE 12 73
Teich, Michael Friedewald, DE 47 563

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