MEMS DEVICE WITH INCREASED TILTING RANGE
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United States of America Patent
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Issued Date -
Feb 6, 2014
app pub date -
Aug 3, 2012
filing date -
Aug 3, 2012
priority date (Note) -
Abandoned
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Abstract
A micro-electro-mechanical (MEMs) devices including a compound hot electrode, which increases the tilting range of the MEMs device. A substantially vertical hot electrode is mounted adjacent to the end or the sides of a pivoting ground electrode, formed of the underside of a pivoting mirror, and combine with a conventional horizontal hot electrode to make up the compound hot electrode.
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