HOT-MELT ADHESIVE SHEET FOR STACKED POLISHING PAD AND ADHESIVE-LAYER-BEARING SUPPORT LAYER FOR STACKED POLISHING PAD

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United States of America Patent

APP PUB NO 20140037947A1
SERIAL NO

14111514

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The purpose of the present invention is to provide a hot-melt adhesive sheet for a stacked polishing pad wherein a polishing layer is resistant to detachment from a support layer even when high temperatures are produced by long periods of polishing. This hot-melt adhesive sheet is used to laminate a polishing layer to a support layer, and the hot-melt adhesive is a polyester-based hot-melt adhesive that, for each 100 weight parts of a polyester-resin base polymer, contains 2 to 10 weight parts of an epoxy resin that has at least two glycidyl groups per molecule.

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Patent Owner(s)

Patent OwnerAddress
ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS INC451 BELLEVUE ROAD NEWARK DE 19713

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kazuno, Atsushi Osaka-shi, JP 26 504

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