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Abstract

A typical post-out flow data path at the IC Fabrication has following major components of software based processing—Boolean operations before the application of resolution enhancement techniques (RET) and optical proximity correctin (OPC), the RET and OPC step [etch retargeting, sub-resolution assist feature insertion (SRAF) and OPC], post-OPCRET Boolean operations and sometimes in the same flow simulation based verification. There are two objectives that an IC Fabrication tapeout flow manager wants to achieve with the flow—predictable completion time and fastest turn-around time (TAT). At times they may be competing. An alternative method of providing target turnaround time and managing the priority of jobs while not doing any upfront resource modeling and resource planning is disclosed. The methodology systematically either meets the turnaround time need and potentially lets the user know if it will not as soon as possible.

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First Claim