CLEANING SOLUTION PRODUCING APPARATUS, CLEANING SOLUTION PRODUCING METHOD, AND SUBSTRATE CLEANING APPARATUS
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United States of America Patent
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Feb 13, 2014
app pub date -
Aug 7, 2013
filing date -
Aug 9, 2012
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Abstract
An cleaning solution producing apparatus according to an embodiment includes: a mixing unit configured to produce a liquid mixture by mixing a hydrogen peroxide solution into an acidic or alkaline liquid, and to raise the pressure of the produced liquid mixture by use of an oxygen gas produced through the decomposition of the hydrogen peroxide solution, or by use of vapor produced by heat of the reaction; and a bubble producing unit configured to produce multiple fine bubbles in the liquid mixture by releasing the pressure of the liquid mixture which is raised by the mixing unit.
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