PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

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Issued Date
Feb 13, 2014
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Aug 6, 2013
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Aug 7, 2012

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Abstract

A piezoelectric element includes a substrate, and a lower electrode layer, a piezoelectric film represented by a general formula of (Na_xK_yLi_z)NbO₃(0

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Patent Owner	Address
SUMITOMO CHEMICAL COMPANY LIMITED	2-7-1 NIHONBASHI CHUO-KU TOKYO 1036020 JAPAN

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
HORIKIRI, Fumimasa	Nagareyama, JP	64	134
NOMOTO, Akira	Kasumigaura, JP	30	204
SHIBATA, Kenji	Tsukuba, JP	182	1249
SUENAGA, Kazufumi	Tsuchiura, JP	62	318
WATANABE, Kazutoshi	Tsuchiura, JP	114	853

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PIEZOELECTRIC ELEMENT, PIEZOELECTRIC DEVICE AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

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13960460

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