VACUUM APPARATUS, METHOD FOR COOLING HEAT SOURCE IN VACUUM, AND THIN FILM MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Feb 20, 2014
app pub date -
Sep 27, 2012
filing date -
Nov 15, 2011
priority date (Note) -
Abandoned
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Abstract
A vacuum apparatus (100) includes: a vacuum chamber (11); a heat source (12) disposed inside the vacuum chamber (11); a cooling device (20) that cools the heat source (12) by circulation of a cooling gas; a gas feed line (1) connected to the cooling device (20) and extending outside the vacuum chamber (11); a cooling gas feeder (14) that feeds the cooling gas to the cooling device (20) through the gas feed line (1) when the heat source (12) is to be cooled; and a vacuum pump (13) that evacuates the cooling device (20) when the heat source (12) is to be used.
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