WAFER EXCHANGE APPARATUS AND WAFER SUPPORTING HAND
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United States of America Patent
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Issued Date -
Feb 27, 2014
app pub date -
Apr 5, 2012
filing date -
Apr 15, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A wafer exchange apparatus is provided that is compact with excellent accessibility. The wafer exchange apparatus of the present invention includes a first and a second hands (10), (20), a first lifting means (30), a casing (40), a horizontal moving means (50) and a second lifting means (60). The first and the second hands (10), (20) are formed in shapes segmented in the left and right direction with generally line symmetry, and support a wafer (100). The first lifting means (30) moves the second hand (20) upward and downward. The casing (40) has the first lifting means (30) built-in, and supports the first hand (10) at a constant position in height while supporting the second hand (20) movably upward and downward. The horizontal moving means (50) moves the casing (40) horizontally. The second lifting means (60) moves the casing (40) upward and downward.
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