X-ray Detector for Electron Microscope
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United States of America Patent
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Issued Date -
Mar 20, 2014
app pub date -
Nov 26, 2013
filing date -
Dec 12, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Multiple detectors arranged in a ring within a specimen chamber provide a large solid angle of collection. The detectors preferably include a shutter and a cold shield that reduce ice formation on the detector. By providing detectors surrounding the sample, a large solid angle is provided for improved detection and x-rays are detected regardless of the direction of sample tilt.
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