Method of removing damaged epoxy from electrostatic chuck

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United States of America Patent

PATENT NO 9105676
APP PUB NO 20140083461A1
SERIAL NO

13624822

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of removing an epoxy band from an electrostatic chuck includes securing the electrostatic chuck in a servicing fixture, applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, forming a hole in the epoxy band and pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chhatre, Rish San Jose, US 5 36
Fang, Yan Fremont, US 65 194
Huang, Tuochuan Saratoga, US 23 689
LaCroix, Cliff Livermore, US 6 12
Newton, Neal San Jose, US 3 9
Shih, Hong Walnut, US 104 3498

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