METHOD AND APPARATUS FOR SEPARATING WORKPIECES

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20140084040A1
SERIAL NO

14033305

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention is an apparatus, for performing the method, and the method including the steps of providing a workpiece, contacting a portion of an exterior surface of the workpiece to an acoustic couplant such that an interface between the acoustic couplant and the portion of the exterior surface is at least substantially continuous across the portion of the exterior surface, and propagating a crack through the workpiece. A portion of the acoustic couplant at the interface has acoustic impedance relative to the acoustic energy that is greater than 400 kg·m−2·s−1.

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Patent Owner(s)

Patent OwnerAddress
ELECTRO SCIENTIFIC INDUSTRIES INC13900 NW SCIENCE PARK DRIVE PORLTLAND OR 97229

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsumoto, Hisashi Portland, US 59 1133
Simenson, Glenn Portland, US 20 465
XU, Qian Portland, US 200 1129
Zhang, Haibin Portland, US 72 982

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