MEMs-based cantilever energy harvester

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United States of America Patent

PATENT NO 9388041
APP PUB NO 20140087509A1
SERIAL NO

14094590

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Abstract

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The claimed invention is directed to integrated energy-harvesting piezoelectric cantilevers. The cantilevers are fabricated using sol-gel processing using a sacrificial poly-Si seeding layer. Improvements in film microstructure and electrical properties are realized by introducing a poly-Si seeding layer and by optimizing the poling process.

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Patent Owner(s)

  • BOARD OF REGENTS, THE UNIVERSITY OF TEXAS SYSTEM;TEXAS MICROPOWER, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fuentes-Fernandez, Erika Richardson, US 3 14
Gnade, Bruce E Lewisville, US 69 3355
Mechtaly-Debray, Wardia Hsinchu County, TW 3 14
Shah, Pradeep Dallas, US 4 30

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