BLADE TYPE MICRO PROBE AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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Issued Date -
Apr 3, 2014
app pub date -
Sep 28, 2012
filing date -
Sep 28, 2012
priority date (Note) -
Abandoned
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Abstract
A blade type micro probe and a method of manufacturing the same are disclosed. The method includes forming a plating seed layer on a substrate, a first blade structure on the plating seed layer and a second blade structure on the first blade structure, wherein the first blade structure includes a first second patterned photo resist layer and a metal layer filling up the voids in the first second patterned photo resist layer and the second blade structure includes a second patterned photo resist layer and an another metal layer filling up the voids in the second patterned photo resist layer, then removing the first and second patterned photo resist layers, and finally removing the plating seed layer and the substrate, thereby forming the blade type micro probe. The first patterned photo resist layer is different from the second patterned photo resist layer in shape.
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