Wavelength tunable interference filter, optical filter device, optical module, and electronic apparatus
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United States of America Patent
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Aug 30, 2016
Grant Date -
Apr 3, 2014
app pub date -
Oct 2, 2013
filing date -
Oct 3, 2012
priority date (Note) -
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Abstract
A wavelength tunable interference filter, an optical filter device, an optical module, and an electronic apparatus include a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflective film provided on the movable substrate and facing the fixed reflective film with an inter-reflective film gap interposed therebetween, and an electrostatic actuator that changes the size of the inter-reflective film gap. The movable substrate is curved in a convex shape in a direction away from the fixed substrate in an initial state. The reflective film has reflectance characteristics in which the first reflectance at a predetermined first wavelength in a measurement wavelength range is lower than the second reflectance at a second wavelength longer than the first wavelength.
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